Eradication of asymmetric spurious modes in AlN MEMS resonators using mode conversion

Anming Gao, Yansong Yang, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Eradication of asymmetric spurious modes in AlN MEMS resonators using mode conversion'. Together they form a unique fingerprint.

Keyphrases

Material Science