This papers reports on a spurious mode suppression technique that converts the asymmetrical (A0) mode to the intended symmetrical (S0) mode vibrations by installing a notch in aluminum nitride (AlN) laterally vibrating resonators. The technique has been experimentally validated to simultaneously eradicate the A0 spurious mode and enhance the S0 mode electromechanical coupling (kt2) for the monolithically integrated resonators over a wide frequency range (100∼600 MHz). The method described herein has overcome a major bottleneck obstructing the deployment of single-chip multi-frequency AlN resonators as a commercially viable solution for RF front-end filtering. It is also the first demonstration of complete A0 mode suppression in lamb-wave resonators with enhancement of kt2.
|Title of host publication
|MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
|Institute of Electrical and Electronics Engineers Inc.
|Number of pages
|Published - Feb 26 2016
|29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: Jan 24 2016 → Jan 28 2016
|Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
|29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
|1/24/16 → 1/28/16
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering