Epitaxial growth of three dimensionally structured III-V photonic crystal via hydride vapor phase epitaxy

Qiye Zheng, Honggyu Kim, Runyu Zhang, Mauro Sardela, Jianmin Zuo, Manavaimaran Balaji, Sebastian Lourdudoss, Yan Ting Sun, Paul V. Braun

Research output: Contribution to journalArticlepeer-review


Three-dimensional (3D) photonic crystals are one class of materials where epitaxy, and the resultant attractive electronic properties, would enable new functionalities for optoelectronic devices. Here we utilize self-assembled colloidal templates to fabricate epitaxially grown single crystal 3D mesostructured GaxIn1-xP (GaInP) semiconductor photonic crystals using hydride vapor phase epitaxy (HVPE). The epitaxial relationship between the 3D GaInP and the substrate is preserved during the growth through the complex geometry of the template as confirmed by X-ray diffraction (XRD) and high resolution transmission electron microscopy. XRD reciprocal space mapping of the 3D epitaxial layer further demonstrates the film to be nearly fully relaxed with a negligible strain gradient. Fourier transform infrared spectroscopy reflection measurement indicates the optical properties of the photonic crystal which agree with finite difference time domain simulations. This work extends the scope of the very few known methods for the fabrication of epitaxial III-V 3D mesostructured materials to the well-developed HVPE technique.

Original languageEnglish (US)
Article number224303
JournalJournal of Applied Physics
Issue number22
StatePublished - Dec 14 2015

ASJC Scopus subject areas

  • General Physics and Astronomy


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