Performing reliable measurements in optical metrology, such as those needed in ellipsometry, requires a calibrated source and detector, or a well-characterized reference sample, We present a novel interferometric technique to perform reliable ellipsometric measurements. This technique relies on the use of a nonclassical optical source, namely, polarization-entangled twin photons generated by spontaneous parametric downconversion from a nonlinear crystal, in conjunction with a coincidence-detection scheme. Ellipsometric measurements acquired with this scheme are absolute, i.e., they require neither source nor detector calibration, nor do they require a reference.
|Original language||English (US)|
|Number of pages||7|
|Journal||Journal of the Optical Society of America B: Optical Physics|
|State||Published - Apr 2002|
ASJC Scopus subject areas
- Statistical and Nonlinear Physics
- Atomic and Molecular Physics, and Optics