Abstract
Performing reliable measurements in optical metrology, such as those needed in ellipsometry, requires a calibrated source and detector, or a well-characterized reference sample, We present a novel interferometric technique to perform reliable ellipsometric measurements. This technique relies on the use of a nonclassical optical source, namely, polarization-entangled twin photons generated by spontaneous parametric downconversion from a nonlinear crystal, in conjunction with a coincidence-detection scheme. Ellipsometric measurements acquired with this scheme are absolute, i.e., they require neither source nor detector calibration, nor do they require a reference.
Original language | English (US) |
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Pages (from-to) | 656-662 |
Number of pages | 7 |
Journal | Journal of the Optical Society of America B: Optical Physics |
Volume | 19 |
Issue number | 4 |
DOIs | |
State | Published - Apr 2002 |
Externally published | Yes |
ASJC Scopus subject areas
- Statistical and Nonlinear Physics
- Atomic and Molecular Physics, and Optics