Enhanced parallel bridge defect inspection using a metalens assisted off-focus scanning imaging

Jinlong Zhu, Sanyogita Purandare, Lynford L Goddard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A near-field metalens is utilized to assist a conventional brightfield microscope for significantly enhancing the signal-to-noise ratio associated with a parallel bridge defect on a 7 nm node patterned wafer.

Original languageEnglish (US)
Title of host publication2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-2
Number of pages2
ISBN (Electronic)9781943580279
DOIs
StatePublished - Oct 25 2017
Event2017 Conference on Lasers and Electro-Optics, CLEO 2017 - San Jose, United States
Duration: May 14 2017May 19 2017

Publication series

Name2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
Volume2017-January

Other

Other2017 Conference on Lasers and Electro-Optics, CLEO 2017
CountryUnited States
CitySan Jose
Period5/14/175/19/17

Fingerprint

inspection
Signal to noise ratio
near fields
Microscopes
signal to noise ratios
Inspection
microscopes
wafers
Scanning
Imaging techniques
Defects
scanning
defects

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

Cite this

Zhu, J., Purandare, S., & Goddard, L. L. (2017). Enhanced parallel bridge defect inspection using a metalens assisted off-focus scanning imaging. In 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings (pp. 1-2). (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings; Vol. 2017-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1364/CLEO_AT.2017.ATh4B.6

Enhanced parallel bridge defect inspection using a metalens assisted off-focus scanning imaging. / Zhu, Jinlong; Purandare, Sanyogita; Goddard, Lynford L.

2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1-2 (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings; Vol. 2017-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zhu, J, Purandare, S & Goddard, LL 2017, Enhanced parallel bridge defect inspection using a metalens assisted off-focus scanning imaging. in 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings, vol. 2017-January, Institute of Electrical and Electronics Engineers Inc., pp. 1-2, 2017 Conference on Lasers and Electro-Optics, CLEO 2017, San Jose, United States, 5/14/17. https://doi.org/10.1364/CLEO_AT.2017.ATh4B.6
Zhu J, Purandare S, Goddard LL. Enhanced parallel bridge defect inspection using a metalens assisted off-focus scanning imaging. In 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1-2. (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings). https://doi.org/10.1364/CLEO_AT.2017.ATh4B.6
Zhu, Jinlong ; Purandare, Sanyogita ; Goddard, Lynford L. / Enhanced parallel bridge defect inspection using a metalens assisted off-focus scanning imaging. 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1-2 (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings).
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