@inproceedings{0911d74b167c449796452defc3b89a76,
title = "Enhanced parallel bridge defect inspection using a metalens assisted off-focus scanning imaging",
abstract = "A near-field metalens is utilized to assist a conventional brightfield microscope for significantly enhancing the signal-to-noise ratio associated with a parallel bridge defect on a 7 nm node patterned wafer.",
author = "Jinlong Zhu and Sanyogita Purandare and Goddard, {Lynford L.}",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 2017 Conference on Lasers and Electro-Optics, CLEO 2017 ; Conference date: 14-05-2017 Through 19-05-2017",
year = "2017",
month = oct,
day = "25",
doi = "10.1364/CLEO_AT.2017.ATh4B.6",
language = "English (US)",
series = "2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1--2",
booktitle = "2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings",
address = "United States",
}