Enhanced Optical Transmission through MacEtch-Fabricated Buried Metal Gratings

Runyu Liu; Xiang Zhao; Christopher Roberts; Lan Yu; Parsian K. Mohseni; Xiuling Li; Viktor Podolskiy; Daniel Wasserman

doi:10.1002/adma.201505111

Enhanced Optical Transmission through MacEtch-Fabricated Buried Metal Gratings

Runyu Liu, Xiang Zhao, Christopher Roberts, Lan Yu, Parsian K. Mohseni, Xiuling Li, Viktor Podolskiy, Daniel Wasserman

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Metallic films with subwavelength apertures, integrated into a semiconductor by metal-assisted chemical etch (MacEtch), demonstrate enhanced transmission when compared to bare semiconductor surfaces. The resulting "buried" metallic structures are characterized spectroscopically and modeled using rigorous coupled wave analysis. These composite materials offer potential integration with optoelectronic devices, for simultaneous near-uniform electrical contact and strong optical coupling to free space.

Original language	English (US)
Pages (from-to)	1441-1448
Number of pages	8
Journal	Advanced Materials
Volume	28
Issue number	7
DOIs	https://doi.org/10.1002/adma.201505111
State	Published - Feb 17 2016

Keywords

antireflection coatings
optical transmission
plasmonics
semiconductors, metallic films

ASJC Scopus subject areas

General Materials Science
Mechanics of Materials
Mechanical Engineering

Online availability

10.1002/adma.201505111

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title = "Enhanced Optical Transmission through MacEtch-Fabricated Buried Metal Gratings",

abstract = "Metallic films with subwavelength apertures, integrated into a semiconductor by metal-assisted chemical etch (MacEtch), demonstrate enhanced transmission when compared to bare semiconductor surfaces. The resulting {"}buried{"} metallic structures are characterized spectroscopically and modeled using rigorous coupled wave analysis. These composite materials offer potential integration with optoelectronic devices, for simultaneous near-uniform electrical contact and strong optical coupling to free space.",

keywords = "antireflection coatings, optical transmission, plasmonics, semiconductors, metallic films",

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AU - Liu, Runyu

AU - Zhao, Xiang

AU - Roberts, Christopher

AU - Yu, Lan

AU - Mohseni, Parsian K.

AU - Li, Xiuling

AU - Podolskiy, Viktor

AU - Wasserman, Daniel

PY - 2016/2/17

Y1 - 2016/2/17

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AB - Metallic films with subwavelength apertures, integrated into a semiconductor by metal-assisted chemical etch (MacEtch), demonstrate enhanced transmission when compared to bare semiconductor surfaces. The resulting "buried" metallic structures are characterized spectroscopically and modeled using rigorous coupled wave analysis. These composite materials offer potential integration with optoelectronic devices, for simultaneous near-uniform electrical contact and strong optical coupling to free space.

KW - antireflection coatings

KW - optical transmission

KW - plasmonics

KW - semiconductors, metallic films

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Enhanced Optical Transmission through MacEtch-Fabricated Buried Metal Gratings

Abstract

Keywords

ASJC Scopus subject areas

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