Enhanced Optical Transmission through MacEtch-Fabricated Buried Metal Gratings

Runyu Liu, Xiang Zhao, Christopher Roberts, Lan Yu, Parsian K. Mohseni, Xiuling Li, Viktor Podolskiy, Daniel Wasserman

Research output: Contribution to journalArticlepeer-review


Metallic films with subwavelength apertures, integrated into a semiconductor by metal-assisted chemical etch (MacEtch), demonstrate enhanced transmission when compared to bare semiconductor surfaces. The resulting "buried" metallic structures are characterized spectroscopically and modeled using rigorous coupled wave analysis. These composite materials offer potential integration with optoelectronic devices, for simultaneous near-uniform electrical contact and strong optical coupling to free space.

Original languageEnglish (US)
Pages (from-to)1441-1448
Number of pages8
JournalAdvanced Materials
Issue number7
StatePublished - Feb 17 2016


  • antireflection coatings
  • optical transmission
  • plasmonics
  • semiconductors, metallic films

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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