Enhanced nanometer-scale infrared spectroscopy with a contact mode microcantilever having an internal resonator paddle

J. R. Felts, K. Kjoller, C. B. Prater, William Paul King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Infrared (IR) spectroscopy is one of the most widely used analytical techniques to measure the chemical composition of organic materials. IR spectra can lead to identification of specific chemical species, but the diffraction limit prohibits IR spectroscopy from probing regions smaller than about 5 μm. This paper demonstrates IR spectroscopy with 100 nm spatial resolution using a tunable IR laser and a vibrating atomic force microscope cantilever. Novel microcantilevers transduce thermomechanical pulses from the laser, with a factor of 6 signal-to-noise improvement over conventional microcantilevers. We show 100 nm IR spectroscopy for chemical identification of ethylene acrylic acid (EAA) and Nylon.

Original languageEnglish (US)
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages136-139
Number of pages4
DOIs
StatePublished - 2010
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: Jan 24 2010Jan 28 2010

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/TerritoryChina
CityHong Kong
Period1/24/101/28/10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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