Enhanced nanometer-scale infrared spectroscopy with a contact mode microcantilever having an internal resonator paddle

J. R. Felts; K. Kjoller; C. B. Prater; William Paul King

doi:10.1109/MEMSYS.2010.5442546

Enhanced nanometer-scale infrared spectroscopy with a contact mode microcantilever having an internal resonator paddle

J. R. Felts, K. Kjoller, C. B. Prater, William Paul King

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Infrared (IR) spectroscopy is one of the most widely used analytical techniques to measure the chemical composition of organic materials. IR spectra can lead to identification of specific chemical species, but the diffraction limit prohibits IR spectroscopy from probing regions smaller than about 5 μm. This paper demonstrates IR spectroscopy with 100 nm spatial resolution using a tunable IR laser and a vibrating atomic force microscope cantilever. Novel microcantilevers transduce thermomechanical pulses from the laser, with a factor of 6 signal-to-noise improvement over conventional microcantilevers. We show 100 nm IR spectroscopy for chemical identification of ethylene acrylic acid (EAA) and Nylon.

Original language	English (US)
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	136-139
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442546
State	Published - 2010
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: Jan 24 2010 → Jan 28 2010

Other

Other	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	1/24/10 → 1/28/10

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

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10.1109/MEMSYS.2010.5442546

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Enhanced nanometer-scale infrared spectroscopy with a contact mode microcantilever having an internal resonator paddle. / Felts, J. R.; Kjoller, K.; Prater, C. B. et al.
MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 136-139 5442546.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Felts, JR, Kjoller, K, Prater, CB & King, WP 2010, Enhanced nanometer-scale infrared spectroscopy with a contact mode microcantilever having an internal resonator paddle. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442546, pp. 136-139, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 1/24/10. https://doi.org/10.1109/MEMSYS.2010.5442546

@inproceedings{f0d5fd74edd54e16a2c7d7b7db83b46a,

title = "Enhanced nanometer-scale infrared spectroscopy with a contact mode microcantilever having an internal resonator paddle",

abstract = "Infrared (IR) spectroscopy is one of the most widely used analytical techniques to measure the chemical composition of organic materials. IR spectra can lead to identification of specific chemical species, but the diffraction limit prohibits IR spectroscopy from probing regions smaller than about 5 μm. This paper demonstrates IR spectroscopy with 100 nm spatial resolution using a tunable IR laser and a vibrating atomic force microscope cantilever. Novel microcantilevers transduce thermomechanical pulses from the laser, with a factor of 6 signal-to-noise improvement over conventional microcantilevers. We show 100 nm IR spectroscopy for chemical identification of ethylene acrylic acid (EAA) and Nylon.",

author = "Felts, {J. R.} and K. Kjoller and Prater, {C. B.} and King, {William Paul}",

year = "2010",

doi = "10.1109/MEMSYS.2010.5442546",

language = "English (US)",

isbn = "9781424457649",

pages = "136--139",

booktitle = "MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest",

note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",

}

TY - GEN

T1 - Enhanced nanometer-scale infrared spectroscopy with a contact mode microcantilever having an internal resonator paddle

AU - Felts, J. R.

AU - Kjoller, K.

AU - Prater, C. B.

AU - King, William Paul

PY - 2010

Y1 - 2010

N2 - Infrared (IR) spectroscopy is one of the most widely used analytical techniques to measure the chemical composition of organic materials. IR spectra can lead to identification of specific chemical species, but the diffraction limit prohibits IR spectroscopy from probing regions smaller than about 5 μm. This paper demonstrates IR spectroscopy with 100 nm spatial resolution using a tunable IR laser and a vibrating atomic force microscope cantilever. Novel microcantilevers transduce thermomechanical pulses from the laser, with a factor of 6 signal-to-noise improvement over conventional microcantilevers. We show 100 nm IR spectroscopy for chemical identification of ethylene acrylic acid (EAA) and Nylon.

AB - Infrared (IR) spectroscopy is one of the most widely used analytical techniques to measure the chemical composition of organic materials. IR spectra can lead to identification of specific chemical species, but the diffraction limit prohibits IR spectroscopy from probing regions smaller than about 5 μm. This paper demonstrates IR spectroscopy with 100 nm spatial resolution using a tunable IR laser and a vibrating atomic force microscope cantilever. Novel microcantilevers transduce thermomechanical pulses from the laser, with a factor of 6 signal-to-noise improvement over conventional microcantilevers. We show 100 nm IR spectroscopy for chemical identification of ethylene acrylic acid (EAA) and Nylon.

UR - http://www.scopus.com/inward/record.url?scp=77952754085&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77952754085&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2010.5442546

DO - 10.1109/MEMSYS.2010.5442546

M3 - Conference contribution

AN - SCOPUS:77952754085

SN - 9781424457649

SP - 136

EP - 139

BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest

T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010

Y2 - 24 January 2010 through 28 January 2010

ER -

Enhanced nanometer-scale infrared spectroscopy with a contact mode microcantilever having an internal resonator paddle

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