Enhanced Microwave Performance of Ion-Implanted Mesfet With Graded Gaas/AlgaAs Heterojunctions

G. W. Wang, M. Feng, Y. P. Liaw, R. Kaliski, Y. Chang, C. L. Lau, C. Ito

Research output: Contribution to journalArticlepeer-review

Abstract

Ion-implanted MESFETs have been fabricated on an inverted GaAs/AlGaAs heterostructure. The aluminium concentration in the AlGaAs is graded from 0% at the substrate to 30% at the heterointerface. A maximum extrinsic transconductance of 410mS/mm is achieved with 0.5 µm gate devices. This heterojunction ion-implanted FET (HIFET) also exhibits enhanced microwave performance, especially at low drain current, when compared to conventional ion-implanted GaAs MESFETs. At 20% of Idss, the current gain cutoff frequency ft is 40 GHz, which increases up to a maximum value of 47 GHz as the drain current rises. These characteristics of high ft and high gain at low current are advantageous for low-noise applications.

Original languageEnglish (US)
Pages (from-to)1105-1106
Number of pages2
JournalElectronics Letters
Volume25
Issue number17
DOIs
StatePublished - Aug 3 1989
Externally publishedYes

Keywords

  • FETs
  • Ion implantation
  • Microwave devices and components
  • Semiconductor devices and materials

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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