Engineered large area fabrication of ordered InGaAs-GaAs nanotube arrays

Su Chun Ik, Varun B. Verma, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Strain induced self-rolling semiconductor nanotubes (SNTs) and related structures represent a new class of building blocks of nanotechnology. They are formed when strained planar bilayers are released from a substrate by selectively removing a sacrificial layer. The top down fabrication approach, compatible with conventional semiconductor processing technology, allows engineered placement of SNTs. In this article, we demonstrate the engineered large area fabrication of ordered InGaAs/GaAs nanotube arrays. In addition, we systematically investigate the crystal orientation dependence of the rolling direction by using a wheel configuration. Other aspects of the fabrication process and their effects on array uniformity are also discussed.

Original languageEnglish (US)
Title of host publicationNanotubes and Related Nanostructures
Pages12-17
Number of pages6
Volume1057
StatePublished - Dec 1 2008
Event2007 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 26 2007Nov 30 2007

Other

Other2007 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period11/26/0711/30/07

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ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Ik, S. C., Verma, V. B., & Li, X. (2008). Engineered large area fabrication of ordered InGaAs-GaAs nanotube arrays. In Nanotubes and Related Nanostructures (Vol. 1057, pp. 12-17)