End-bonded contacts for carbon nanotube transistors with low, size-independent resistance

Qing Cao, Shu Jen Han, Jerry Tersoff, Aaron D. Franklin, Yu Zhu, Zhen Zhang, George S. Tulevski, Jianshi Tang, Wilfried Haensch

Research output: Contribution to journalArticle

Abstract

Moving beyond the limits of silicon transistors requires both a high-performance channel and high-quality electrical contacts. Carbon nanotubes provide high-performance channels below 10 nanometers, but as with silicon, the increase in contact resistance with decreasing size becomes a major performance roadblock.We report a single-walled carbon nanotube (SWNT) transistor technology with an end-bonded contact scheme that leads to sizeindependent contact resistance to overcome the scaling limits of conventional side-bonded or planar contact schemes. A high-performance SWNT transistor was fabricated with a sub-10-nanometer contact length, showing a device resistance below 36 kilohms and oncurrent above 15 microampere per tube. The p-type end-bonded contact, formed through the reaction of molybdenum with the SWNT to form carbide, also exhibited no Schottky barrier.This strategy promises high-performance SWNT transistors, enabling future ultimately scaled device technologies.

Original languageEnglish (US)
Pages (from-to)68-72
Number of pages5
JournalScience
Volume350
Issue number6256
DOIs
StatePublished - Oct 2 2015
Externally publishedYes

ASJC Scopus subject areas

  • General

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    Cao, Q., Han, S. J., Tersoff, J., Franklin, A. D., Zhu, Y., Zhang, Z., Tulevski, G. S., Tang, J., & Haensch, W. (2015). End-bonded contacts for carbon nanotube transistors with low, size-independent resistance. Science, 350(6256), 68-72. https://doi.org/10.1126/science.aac8006