Emerging materials for microelectromechanical systems at elevated temperatures

Jessica Anne Krogstad, Chris Keimel, Kevin J. Hemker

Research output: Contribution to journalReview articlepeer-review

Abstract

Extension of microelectromechanical systems (MEMS) into more extreme operating conditions will require a wider range of material properties than are currently available in conventional systems. Successful integration of new materials is dependent on concurrent development of compatible fabrication routes and scale appropriate evaluation techniques. This review focuses on emerging material classes that have potential to replace silicon-based MEMS in elevated temperature applications. Basic silicon mechanical properties and micromachining methods are reviewed to provide context for developing material systems such as silicon carbide, silicon carbonitrides, and several nickel-based alloys. Potential improvements in strength, thermal stability, and reliability are juxtaposed with fabrication, reproducibility, and economic feasibility issues that must also be addressed.

Original languageEnglish (US)
Pages (from-to)1597-1608
Number of pages12
JournalJournal of Materials Research
Volume29
Issue number15
DOIs
StatePublished - Jan 1 2014
Externally publishedYes

Keywords

  • Microelectromechanical systems (MEMSs)
  • material selection
  • mechanical properties
  • metals

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Emerging materials for microelectromechanical systems at elevated temperatures'. Together they form a unique fingerprint.

Cite this