Embedding microscale metal patterns in polydimethylsiloxane substrate

Kwan Seop Lim, Woo Jin Chang, Yoon Mo Koo, Rashid Bashir

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have developed a new method of patterning of microscale matel features in polydimethylsiloxane (PDMS) substrate. Micron sized metal patterns are fabricated on Au layered substrate, and embedded into PDMS surface. With this technique, we can make metal micropatterns reliability with less than 2 μm width, embedded in the PDMS substrate.

Original languageEnglish (US)
Title of host publicationMicro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference
Subtitle of host publication9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherTransducer Research Foundation
Pages696-698
Number of pages3
ISBN (Print)0974361119, 9780974361116
StatePublished - Jan 1 2005
Externally publishedYes
Event9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 - Boston, MA, United States
Duration: Oct 9 2005Oct 13 2005

Publication series

NameMicro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Volume1

Other

Other9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005
CountryUnited States
CityBoston, MA
Period10/9/0510/13/05

Keywords

  • Metal micropatterning
  • Polydimethylsiloxane

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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