@inproceedings{d4bd269b401e409497895e53807f585f,
title = "Embedding microscale metal patterns in polydimethylsiloxane substrate",
abstract = "We have developed a new method of patterning of microscale matel features in polydimethylsiloxane (PDMS) substrate. Micron sized metal patterns are fabricated on Au layered substrate, and embedded into PDMS surface. With this technique, we can make metal micropatterns reliability with less than 2 μm width, embedded in the PDMS substrate.",
keywords = "Metal micropatterning, Polydimethylsiloxane",
author = "Lim, {Kwan Seop} and Chang, {Woo Jin} and Koo, {Yoon Mo} and Rashid Bashir",
year = "2005",
language = "English (US)",
isbn = "0974361119",
series = "Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
publisher = "Transducer Research Foundation",
pages = "696--698",
booktitle = "Micro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference",
note = "9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 ; Conference date: 09-10-2005 Through 13-10-2005",
}