Elimination of Spurious Modes in SH0 Lithium Niobate Laterally Vibrating Resonators

Yong Ha Song, Songbin Gong

Research output: Contribution to journalArticle

Abstract

This letter reports on a spurious mode suppression technique for the shear horizontal (SH0) mode lithium niobate laterally vibrating resonators. The concept utilizes triangular and arched edge shapes on the transversal sides of a resonant cavity to effectively distribute and scatter the acoustic waves in the inactive regions, yielding the suppression of transverse spurious modes. 2D models and 3D finite-element analyses were employed to theoretically verify the technique. For devices with the arched-shape edges, complete removal of higher order transverse modes has been experimentally demonstrated with × enhancement for quality factor (Q). The Q enhancement arises from the improved concentration of mechanical energy under the inter-digitated transducers. The fabricated device exhibits a Q of 920, a large electromechanical coupling (kt2) of 17.8%, and a figure of merit of 164.

Original languageEnglish (US)
Article number7265019
Pages (from-to)1198-1201
Number of pages4
JournalIEEE Electron Device Letters
Volume36
Issue number11
DOIs
StatePublished - Nov 1 2015

Keywords

  • Lithium niobate
  • high electromechanical coupling
  • laterally vibrating resonators
  • piezoelectric resonators
  • spurious mode suppression

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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