Elimination of Spurious Modes in SH0 Lithium Niobate Laterally Vibrating Resonators

Yong Ha Song, Songbin Gong

Research output: Contribution to journalArticle

Abstract

This letter reports on a spurious mode suppression technique for the shear horizontal (SH0) mode lithium niobate laterally vibrating resonators. The concept utilizes triangular and arched edge shapes on the transversal sides of a resonant cavity to effectively distribute and scatter the acoustic waves in the inactive regions, yielding the suppression of transverse spurious modes. 2D models and 3D finite-element analyses were employed to theoretically verify the technique. For devices with the arched-shape edges, complete removal of higher order transverse modes has been experimentally demonstrated with × enhancement for quality factor (Q). The Q enhancement arises from the improved concentration of mechanical energy under the inter-digitated transducers. The fabricated device exhibits a Q of 920, a large electromechanical coupling (kt2) of 17.8%, and a figure of merit of 164.

Original languageEnglish (US)
Article number7265019
Pages (from-to)1198-1201
Number of pages4
JournalIEEE Electron Device Letters
Volume36
Issue number11
DOIs
StatePublished - Nov 1 2015

Fingerprint

Electromechanical coupling
Cavity resonators
Resonators
Transducers
Lithium
Acoustic waves
lithium niobate

Keywords

  • Lithium niobate
  • high electromechanical coupling
  • laterally vibrating resonators
  • piezoelectric resonators
  • spurious mode suppression

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Elimination of Spurious Modes in SH0 Lithium Niobate Laterally Vibrating Resonators. / Song, Yong Ha; Gong, Songbin.

In: IEEE Electron Device Letters, Vol. 36, No. 11, 7265019, 01.11.2015, p. 1198-1201.

Research output: Contribution to journalArticle

@article{e5a1701b001e43b9a956c05c411c0e3f,
title = "Elimination of Spurious Modes in SH0 Lithium Niobate Laterally Vibrating Resonators",
abstract = "This letter reports on a spurious mode suppression technique for the shear horizontal (SH0) mode lithium niobate laterally vibrating resonators. The concept utilizes triangular and arched edge shapes on the transversal sides of a resonant cavity to effectively distribute and scatter the acoustic waves in the inactive regions, yielding the suppression of transverse spurious modes. 2D models and 3D finite-element analyses were employed to theoretically verify the technique. For devices with the arched-shape edges, complete removal of higher order transverse modes has been experimentally demonstrated with × enhancement for quality factor (Q). The Q enhancement arises from the improved concentration of mechanical energy under the inter-digitated transducers. The fabricated device exhibits a Q of 920, a large electromechanical coupling (kt2) of 17.8{\%}, and a figure of merit of 164.",
keywords = "Lithium niobate, high electromechanical coupling, laterally vibrating resonators, piezoelectric resonators, spurious mode suppression",
author = "Song, {Yong Ha} and Songbin Gong",
year = "2015",
month = "11",
day = "1",
doi = "10.1109/LED.2015.2478378",
language = "English (US)",
volume = "36",
pages = "1198--1201",
journal = "IEEE Electron Device Letters",
issn = "0741-3106",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "11",

}

TY - JOUR

T1 - Elimination of Spurious Modes in SH0 Lithium Niobate Laterally Vibrating Resonators

AU - Song, Yong Ha

AU - Gong, Songbin

PY - 2015/11/1

Y1 - 2015/11/1

N2 - This letter reports on a spurious mode suppression technique for the shear horizontal (SH0) mode lithium niobate laterally vibrating resonators. The concept utilizes triangular and arched edge shapes on the transversal sides of a resonant cavity to effectively distribute and scatter the acoustic waves in the inactive regions, yielding the suppression of transverse spurious modes. 2D models and 3D finite-element analyses were employed to theoretically verify the technique. For devices with the arched-shape edges, complete removal of higher order transverse modes has been experimentally demonstrated with × enhancement for quality factor (Q). The Q enhancement arises from the improved concentration of mechanical energy under the inter-digitated transducers. The fabricated device exhibits a Q of 920, a large electromechanical coupling (kt2) of 17.8%, and a figure of merit of 164.

AB - This letter reports on a spurious mode suppression technique for the shear horizontal (SH0) mode lithium niobate laterally vibrating resonators. The concept utilizes triangular and arched edge shapes on the transversal sides of a resonant cavity to effectively distribute and scatter the acoustic waves in the inactive regions, yielding the suppression of transverse spurious modes. 2D models and 3D finite-element analyses were employed to theoretically verify the technique. For devices with the arched-shape edges, complete removal of higher order transverse modes has been experimentally demonstrated with × enhancement for quality factor (Q). The Q enhancement arises from the improved concentration of mechanical energy under the inter-digitated transducers. The fabricated device exhibits a Q of 920, a large electromechanical coupling (kt2) of 17.8%, and a figure of merit of 164.

KW - Lithium niobate

KW - high electromechanical coupling

KW - laterally vibrating resonators

KW - piezoelectric resonators

KW - spurious mode suppression

UR - http://www.scopus.com/inward/record.url?scp=84946568691&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84946568691&partnerID=8YFLogxK

U2 - 10.1109/LED.2015.2478378

DO - 10.1109/LED.2015.2478378

M3 - Article

AN - SCOPUS:84946568691

VL - 36

SP - 1198

EP - 1201

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

SN - 0741-3106

IS - 11

M1 - 7265019

ER -