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Electrothermal microcantilever with integrated solid-state heater-thermometer and npn back-to-back diodes
Patrick C. Fletcher, Bikram S. Bhatia, Yan Wu, Mark A. Shannon, William P. King
- Mechanical Science and Engineering
- Grainger College of Engineering
- Materials Science and Engineering
- Materials Research Lab
- Information Trust Institute
- Micro and Nanotechnology Lab
- Electrical and Computer Engineering
- Beckman Institute for Advanced Science and Technology
- Biomedical and Translational Sciences
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution