Electrothermal microcantilever with integrated solid-state heater-thermometer and npn back-to-back diodes

Patrick C. Fletcher, Bikram S. Bhatia, Yan Wu, Mark A. Shannon, William P. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports the integration of both electrical and thermal elements into an atomic force microscope (AFM) cantilever, where the electrode and heater-thermometer are electrically isolated by an NPN back-to-back diode. The electrothermal (ET) cantilever can be self-heated to more than 400°C while the tip voltage can be measured or controlled independent of tip temperature, up to 10 volts. To our knowledge, this is the first microcantilever to have a solid-state junction and heater integrated near a tip.

Original languageEnglish (US)
Title of host publication2010 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsDavid J. Monk, Kimberly L. Turner
PublisherTransducer Research Foundation
Pages94-95
Number of pages2
ISBN (Electronic)0964002485, 9780964002487
StatePublished - Jan 1 2010
Event2010 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 6 2010Jun 10 2010

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2010 Solid-State Sensors, Actuators, and Microsystems Workshop
Country/TerritoryUnited States
CityHilton Head Island
Period6/6/106/10/10

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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