@inproceedings{0e4c4f4013ac4d8ebaeca9d6a6cc9eb2,
title = "Electrothermal microcantilever with integrated solid-state heater-thermometer and npn back-to-back diodes",
abstract = "This paper reports the integration of both electrical and thermal elements into an atomic force microscope (AFM) cantilever, where the electrode and heater-thermometer are electrically isolated by an NPN back-to-back diode. The electrothermal (ET) cantilever can be self-heated to more than 400°C while the tip voltage can be measured or controlled independent of tip temperature, up to 10 volts. To our knowledge, this is the first microcantilever to have a solid-state junction and heater integrated near a tip.",
author = "Fletcher, {Patrick C.} and Bhatia, {Bikram S.} and Yan Wu and Shannon, {Mark A.} and King, {William P.}",
note = "Publisher Copyright: {\textcopyright} 2010TRF.; 2010 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 06-06-2010 Through 10-06-2010",
year = "2010",
language = "English (US)",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "94--95",
editor = "Monk, {David J.} and Turner, {Kimberly L.}",
booktitle = "2010 Solid-State Sensors, Actuators, and Microsystems Workshop",
}