Electrothermal atomic-force microscope cantilever with integrated heater and n-p-n Back-to-Back Diodes

Patrick C. Fletcher, Bikramjit S. Bhatia, Yan Wu, Mark A. Shannon, William P. King

Research output: Contribution to journalArticle

Abstract

This paper reports the integration of both electrical and thermal elements into the free end of an atomic-force microscope cantilever, where the electrode and heaterthermometer are electrically isolated by an NPN semiconductor back-to-back diode. The electrothermal cantilever can be self heated using an integrated solid-state heater to more than 600°C}. The tip voltage can be measured or controlled independent of the tip temperature, either in the direct or the alternating current mode. To our knowledge, this setup is the first microcantilever to have a solid-state junction and heater integrated near a scanning probe tip.

Original languageEnglish (US)
Article number5749675
Pages (from-to)644-653
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume20
Issue number3
DOIs
StatePublished - Jun 1 2011

Keywords

  • Atomic-force microscope (AFM)
  • cantilever
  • diode
  • electrothermal (ET)
  • scanning probe microscopy

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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