@inproceedings{26d1934a04534128906bfd36ad09e799,
title = "Electrostatically actuated microvalves fabricated with soft lithographic techniques",
abstract = "This paper reports the design, fabrication, and testing of an electrostatically actuated microvalve that is molded in polydimethylsiloxane (PDMS) and fabricated exclusively with soft-lithographic techniques. The valve is composed of a deflecting elastomeric membrane with embedded conducting nanoparticles suspended above a microfluidic channel. Some of our present valve configurations require actuation potentials as low as 20 V, and model-based predictions suggest lower potentials are accessible with proper process controls.",
keywords = "Electrostatic, Large scale integration, Microvalve",
author = "Tice, {Joshua D.} and Desai, {Amit V.} and Bassett, {Tom A.} and {Ten Eyck}, {Gregory A.} and Apblett, {Christopher A.} and Kenis, {Paul J A}",
year = "2009",
language = "English (US)",
isbn = "9780979806421",
series = "Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
publisher = "Chemical and Biological Microsystems Society",
pages = "1674--1676",
booktitle = "Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences",
note = "13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2009 ; Conference date: 01-11-2009 Through 05-11-2009",
}