Electrostatically actuated microvalves fabricated with soft lithographic techniques

Joshua D. Tice, Amit V. Desai, Tom A. Bassett, Gregory A. Ten Eyck, Christopher A. Apblett, Paul J A Kenis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports the design, fabrication, and testing of an electrostatically actuated microvalve that is molded in polydimethylsiloxane (PDMS) and fabricated exclusively with soft-lithographic techniques. The valve is composed of a deflecting elastomeric membrane with embedded conducting nanoparticles suspended above a microfluidic channel. Some of our present valve configurations require actuation potentials as low as 20 V, and model-based predictions suggest lower potentials are accessible with proper process controls.

Original languageEnglish (US)
Title of host publicationProceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherChemical and Biological Microsystems Society
Pages1674-1676
Number of pages3
ISBN (Print)9780979806421
StatePublished - Jan 1 2009
Event13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2009 - Jeju, Korea, Republic of
Duration: Nov 1 2009Nov 5 2009

Publication series

NameProceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Other

Other13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2009
CountryKorea, Republic of
CityJeju
Period11/1/0911/5/09

Keywords

  • Electrostatic
  • Large scale integration
  • Microvalve

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

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  • Cite this

    Tice, J. D., Desai, A. V., Bassett, T. A., Ten Eyck, G. A., Apblett, C. A., & Kenis, P. J. A. (2009). Electrostatically actuated microvalves fabricated with soft lithographic techniques. In Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 1674-1676). (Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences). Chemical and Biological Microsystems Society.