Electrostatic microvalves for integrated microchemical systems

J. D. Tice, A. V. Desai, T. A. Bassett, C. A. Apblett, P. J.A. Kenis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report the design, fabrication, and testing of an electrostatic microvalve for portable integrated microfluidic devices. The valve operates with electrical potentials under 300 V and accommodates pressures as high as 10 kPa. The valves are utilized to direct pressure to pneumatic microvalves, which significantly reduces the ancillaries typically needed to operate the pneumatic actuators.

Original languageEnglish (US)
Title of host publication15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011
Pages1813-1815
Number of pages3
StatePublished - Dec 1 2011
Event15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011 - Seattle, WA, United States
Duration: Oct 2 2011Oct 6 2011

Publication series

Name15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011
Volume3

Other

Other15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011
CountryUnited States
CitySeattle, WA
Period10/2/1110/6/11

Keywords

  • Electrostatic
  • Integrated microfluidic chip
  • Microvalve
  • Pneumatic

ASJC Scopus subject areas

  • Control and Systems Engineering

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  • Cite this

    Tice, J. D., Desai, A. V., Bassett, T. A., Apblett, C. A., & Kenis, P. J. A. (2011). Electrostatic microvalves for integrated microchemical systems. In 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011 (pp. 1813-1815). (15th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2011, MicroTAS 2011; Vol. 3).