Electron beam induced deposition of silicon nanostructures from a liquid phase precursor

Yin Liu, Xin Chen, Kyong Wook Noh, Shen J. Dillon

Research output: Contribution to journalArticlepeer-review


This work demonstrates electron beam induced deposition of silicon from a SiCl 4 liquid precursor in a transmission electron microscope and a scanning electron microscope. Silicon nanodots of tunable size are reproducibly grown in controlled geometries. The volume of these features increases linearly with deposition time. The results indicate that secondary electrons generated at the substrate surface serve as the primary source of silicon reduction. However, at high current densities the influence of the primary electrons is observed to retard growth. The results demonstrate a new approach to fabricating silicon nanostructures and provide fundamental insights into the mechanism for liquid phase electron beam induced deposition.

Original languageEnglish (US)
Article number385302
Issue number38
StatePublished - Sep 28 2012

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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