Electrode and condenser materials for plasma pinch sources

A. Hassanein, J. P. Allain, T. Burtseva, Z. Insepov, J. N. Brooks, I. Konkashbaev, V. Morozov, V. Sizyuk, V. Tolkach, T. Sizyuk, B. Rice, V. Safronov, V. Bakshi

Research output: ResearchChapter

LanguageEnglish (US)
Title of host publicationEUV Sources for Lithography
PublisherSPIE
Pages915-956
Number of pages42
ISBN (Electronic)9780819480712
ISBN (Print)0819458457, 9780819458452
DOIs
StatePublished - Feb 23 2006

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Hassanein, A., Allain, J. P., Burtseva, T., Insepov, Z., Brooks, J. N., Konkashbaev, I., ... Bakshi, V. (2006). Electrode and condenser materials for plasma pinch sources. In EUV Sources for Lithography (pp. 915-956). SPIE. DOI: 10.1117/3.613774.Ch35

Electrode and condenser materials for plasma pinch sources. / Hassanein, A.; Allain, J. P.; Burtseva, T.; Insepov, Z.; Brooks, J. N.; Konkashbaev, I.; Morozov, V.; Sizyuk, V.; Tolkach, V.; Sizyuk, T.; Rice, B.; Safronov, V.; Bakshi, V.

EUV Sources for Lithography. SPIE, 2006. p. 915-956.

Research output: ResearchChapter

Hassanein, A, Allain, JP, Burtseva, T, Insepov, Z, Brooks, JN, Konkashbaev, I, Morozov, V, Sizyuk, V, Tolkach, V, Sizyuk, T, Rice, B, Safronov, V & Bakshi, V 2006, Electrode and condenser materials for plasma pinch sources. in EUV Sources for Lithography. SPIE, pp. 915-956. DOI: 10.1117/3.613774.Ch35
Hassanein A, Allain JP, Burtseva T, Insepov Z, Brooks JN, Konkashbaev I et al. Electrode and condenser materials for plasma pinch sources. In EUV Sources for Lithography. SPIE. 2006. p. 915-956. Available from, DOI: 10.1117/3.613774.Ch35
Hassanein, A. ; Allain, J. P. ; Burtseva, T. ; Insepov, Z. ; Brooks, J. N. ; Konkashbaev, I. ; Morozov, V. ; Sizyuk, V. ; Tolkach, V. ; Sizyuk, T. ; Rice, B. ; Safronov, V. ; Bakshi, V./ Electrode and condenser materials for plasma pinch sources. EUV Sources for Lithography. SPIE, 2006. pp. 915-956
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