Electrochemical Imprinting Of Micro-and Nano-structures In Porous Silicon, Silicon, And Other Semiconductors

Keng Hao Hsu (Inventor), Bruno Azeredo (Inventor), Placid M Ferreira (Inventor)

Research output: Patent

Original languageEnglish (US)
U.S. patent number11579524
StatePublished - Feb 14 2023

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