Electro-thermal microcantilever with integrated solid-state heater, conductive tip, and Schottky diode

Nicholas I. Maniscalco, William P. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a heated atomic force microscope cantilever having a Schottky diode fabricated near the cantilever free end and a highly conducting tip. The forward bias and reverse bias operation of this probe offer different current-voltage characteristics, such that the cantilever heating and temperature sensing capabilities are different in forward bias versus reverse bias operation. The asymmetric characteristics are due to the diode junction at the metal-silicon interface, which grants an additional degree of electro-thermal control compared to other types of heated cantilevers. To our knowledge this is the first batch-fabricated heated microcantilever with a metal-silicon diode junction fabricated near a tip.

Original languageEnglish (US)
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages566-569
Number of pages4
DOIs
StatePublished - Dec 1 2010
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: Nov 1 2010Nov 4 2010

Publication series

NameProceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
CountryUnited States
CityWaikoloa, HI
Period11/1/1011/4/10

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Electro-thermal microcantilever with integrated solid-state heater, conductive tip, and Schottky diode'. Together they form a unique fingerprint.

Cite this