TY - GEN
T1 - Electro-thermal microcantilever with integrated solid-state heater, conductive tip, and Schottky diode
AU - Maniscalco, Nicholas I.
AU - King, William P.
PY - 2010
Y1 - 2010
N2 - This paper reports a heated atomic force microscope cantilever having a Schottky diode fabricated near the cantilever free end and a highly conducting tip. The forward bias and reverse bias operation of this probe offer different current-voltage characteristics, such that the cantilever heating and temperature sensing capabilities are different in forward bias versus reverse bias operation. The asymmetric characteristics are due to the diode junction at the metal-silicon interface, which grants an additional degree of electro-thermal control compared to other types of heated cantilevers. To our knowledge this is the first batch-fabricated heated microcantilever with a metal-silicon diode junction fabricated near a tip.
AB - This paper reports a heated atomic force microscope cantilever having a Schottky diode fabricated near the cantilever free end and a highly conducting tip. The forward bias and reverse bias operation of this probe offer different current-voltage characteristics, such that the cantilever heating and temperature sensing capabilities are different in forward bias versus reverse bias operation. The asymmetric characteristics are due to the diode junction at the metal-silicon interface, which grants an additional degree of electro-thermal control compared to other types of heated cantilevers. To our knowledge this is the first batch-fabricated heated microcantilever with a metal-silicon diode junction fabricated near a tip.
UR - http://www.scopus.com/inward/record.url?scp=79951903616&partnerID=8YFLogxK
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U2 - 10.1109/ICSENS.2010.5690481
DO - 10.1109/ICSENS.2010.5690481
M3 - Conference contribution
AN - SCOPUS:79951903616
SN - 9781424481682
T3 - Proceedings of IEEE Sensors
SP - 566
EP - 569
BT - IEEE Sensors 2010 Conference, SENSORS 2010
T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010
Y2 - 1 November 2010 through 4 November 2010
ER -