Abstract

We report measurements of the electronic noise characteristics of doped silicon microcantilever heaterthermometers. The noise floor is measured over the range 1 Hz-12 kHz while the cantilever is resistively heated over the temperature range of 297-615 K. At low frequency 1 / f, or flicker, noise is the dominant noise type, while at high frequency the Johnson, or thermal, noise dominates. The Johnson noise floor is found to be less than 10 nV / Hz 1/2, which corresponds to a cantilever temperature precision of about 2-30 μK / Hz1/2 over the temperature range measured. To our knowledge, this paper reports the first detailed measurements of noise in a heated microcantilever sensor.

Original languageEnglish (US)
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Pages2373-2376
Number of pages4
DOIs
StatePublished - 2010
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: Nov 1 2010Nov 4 2010

Publication series

NameProceedings of IEEE Sensors

Other

Other9th IEEE Sensors Conference 2010, SENSORS 2010
Country/TerritoryUnited States
CityWaikoloa, HI
Period11/1/1011/4/10

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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