Abstract
This paper presents the electrical and morphological properties at the interface between a metal (Au) and a semiconductor (Si) formed by a novel transfer-printing technology. This work shows that a transfer-printed thin (hundreds of nanometers) Au film forms excellent electrical contact on a Si substrate when appropriate thermal treatment is applied. The successful electrical contact is attributed to eutectic joining, which allows for the right amount of atomic level mass transport between Au and Si. The outcomes suggest that transfer-printing-based micromanufacturing can realize not only strong mechanical bonding but also high-quality electrical contact via eutectic joining.
Original language | English (US) |
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Pages (from-to) | 6061-6065 |
Number of pages | 5 |
Journal | ACS Applied Materials and Interfaces |
Volume | 5 |
Issue number | 13 |
DOIs | |
State | Published - Jul 10 2013 |
Keywords
- contact resistance
- eutectic bonding
- metal-semiconductor contact
- transfer printing
- transmission line model
ASJC Scopus subject areas
- General Materials Science