Elastic constants, Poisson ratios, and the elastic anisotropy of VN(001), (011), and (111) epitaxial layers grown by reactive magnetron sputter deposition

A. B. Mei, R. B. Wilson, D. Li, David G. Cahill, A. Rockett, J. Birch, L. Hultman, J. E. Greene, I. Petrov

Research output: Contribution to journalArticle

Abstract

Elastic constants are determined for single-crystal stoichiometric NaCl-structure VN(001), VN(011), and VN(111) epitaxial layers grown by magnetically unbalanced reactive magnetron sputter deposition on 001-, 011-, and 111-oriented MgO substrates at 430 °C. The relaxed lattice parameter a o = 0.4134 ± 0.0004 nm, obtained from high-resolution reciprocal space maps, and the mass density ρ = 6.1 g/cm3, determined from the combination of Rutherford backscattering spectroscopy and film thickness measurements, of the VN layers are both in good agreement with reported values for bulk crystals. Sub-picosecond ultrasonic optical pump/probe techniques are used to generate and detect VN longitudinal sound waves with measured velocities v001 = 9.8 ± 0.3, v011 = 9.1 ± 0.3, and v111 = 9.1 ± 0.3 km/s. The VN c11 elastic constant is determined from the sound wave velocity measurements as 585 ± 30 GPa; the c44 elastic constant, 126 ± 3 GPa, is obtained from surface acoustic wave measurements. From the combination of c 11, c44, vhkl, and ρ we obtain the VN c12 elastic constant 178 ± 33 GPa, the VN elastic anisotropy A = 0.62, the isotropic Poisson ratio ν = 0.29, and the anisotropic Poisson ratios ν001 = 0.23, ν011 = 0.30, and ν111 = 0.29.

Original languageEnglish (US)
Article number214908
JournalJournal of Applied Physics
Volume115
Issue number21
DOIs
StatePublished - Jun 7 2014

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elastic anisotropy
Poisson ratio
elastic properties
sound waves
velocity measurement
lattice parameters
backscattering
film thickness
ultrasonics
pumps
acoustics
probes
high resolution
single crystals
spectroscopy
crystals

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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Elastic constants, Poisson ratios, and the elastic anisotropy of VN(001), (011), and (111) epitaxial layers grown by reactive magnetron sputter deposition. / Mei, A. B.; Wilson, R. B.; Li, D.; Cahill, David G.; Rockett, A.; Birch, J.; Hultman, L.; Greene, J. E.; Petrov, I.

In: Journal of Applied Physics, Vol. 115, No. 21, 214908, 07.06.2014.

Research output: Contribution to journalArticle

Mei, A. B. ; Wilson, R. B. ; Li, D. ; Cahill, David G. ; Rockett, A. ; Birch, J. ; Hultman, L. ; Greene, J. E. ; Petrov, I. / Elastic constants, Poisson ratios, and the elastic anisotropy of VN(001), (011), and (111) epitaxial layers grown by reactive magnetron sputter deposition. In: Journal of Applied Physics. 2014 ; Vol. 115, No. 21.
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