Elastic constants of single-crystal Ti Nx (001) (0.67≤x≤1.0) determined as a function of x by picosecond ultrasonic measurements

Taeyoon Lee, K. Ohmori, C. S. Shin, David G. Cahill, I. Petrov, J. E. Greene

Research output: Contribution to journalArticlepeer-review

Abstract

The elastic constants c11 and c44 of single-crystal NaCl-structure δ-TiNx (001) layers, with x ranging from 0.67 to 1.0, were determined using sound velocity measurements. Picosecond ultrasonic optical pump/probe techniques were employed to generate and detect longitudinal sound waves and surface acoustic waves (SAW) in order to obtain c11 (x) and c44 (x), respectively. SAW generation was achieved by depositing a periodic series of Al bars on the Ti Nx (001) layers to spatially modulate the surface reflectivity. c11 and c44 were found to decrease continuously from 626 and 156 GPa with x=1 to 439 and 92 GPa with x=0.67. The Voit-Reuss-Hill average aggregate elastic moduli EVRH (x) obtained from our measured c11 (x) and c44 (x) values are in good agreement with previous Ti Nx (001) nanoindentation results.

Original languageEnglish (US)
Article number144106
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume71
Issue number14
DOIs
StatePublished - 2005

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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