Efficient Optical Coupling between III-V Semiconductor and SiNxWaveguides via Heteroepitaxial Integration

Christopher Heidelberger; Cheryl Sorace-Agaskar; Jason J. Plant; Dave Kharas; Reuel B. Swint; Pankul Dhingra; Minjoo L. Lee; Paul W. Juodawlkis

doi:10.1109/IPC48725.2021.9593053

Efficient Optical Coupling between III-V Semiconductor and SiN_xWaveguides via Heteroepitaxial Integration

Christopher Heidelberger, Cheryl Sorace-Agaskar, Jason J. Plant, Dave Kharas, Reuel B. Swint, Pankul Dhingra, Minjoo L. Lee, Paul W. Juodawlkis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We demonstrate the first reported integration of III-V waveguides (GaAs/Al0.4Ga0.6As) with SiNx waveguides via heteroepitaxial III-V-on-silicon growth. We achieve efficient optical coupling (-2.5 dB loss/transition) at 1550 nm and low threading dislocation density (4times 10{6}{cm}{-2}), suitable for fabrication of high-performance optoelectronic devices.

Original language	English (US)
Title of host publication	2021 IEEE Photonics Conference, IPC 2021 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781665416016
DOIs	https://doi.org/10.1109/IPC48725.2021.9593053
State	Published - 2021
Event	2021 IEEE Photonics Conference, IPC 2021 - Virtual, Online, Canada Duration: Oct 18 2021 → Oct 21 2021

Publication series

Name	2021 IEEE Photonics Conference, IPC 2021 - Proceedings

Conference

Conference	2021 IEEE Photonics Conference, IPC 2021
Country/Territory	Canada
City	Virtual, Online
Period	10/18/21 → 10/21/21

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Instrumentation
Atomic and Molecular Physics, and Optics
Artificial Intelligence
Computer Networks and Communications

Online availability

10.1109/IPC48725.2021.9593053

Library availability

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Cite this

Heidelberger, C., Sorace-Agaskar, C., Plant, J. J., Kharas, D., Swint, R. B., Dhingra, P., Lee, M. L., & Juodawlkis, P. W. (2021). Efficient Optical Coupling between III-V Semiconductor and SiN_xWaveguides via Heteroepitaxial Integration. In 2021 IEEE Photonics Conference, IPC 2021 - Proceedings (2021 IEEE Photonics Conference, IPC 2021 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IPC48725.2021.9593053

Efficient Optical Coupling between III-V Semiconductor and SiN_xWaveguides via Heteroepitaxial Integration. / Heidelberger, Christopher; Sorace-Agaskar, Cheryl; Plant, Jason J. et al.

2021 IEEE Photonics Conference, IPC 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. (2021 IEEE Photonics Conference, IPC 2021 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Heidelberger, C, Sorace-Agaskar, C, Plant, JJ, Kharas, D, Swint, RB, Dhingra, P, Lee, ML & Juodawlkis, PW 2021, Efficient Optical Coupling between III-V Semiconductor and SiN_xWaveguides via Heteroepitaxial Integration. in 2021 IEEE Photonics Conference, IPC 2021 - Proceedings. 2021 IEEE Photonics Conference, IPC 2021 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2021 IEEE Photonics Conference, IPC 2021, Virtual, Online, Canada, 10/18/21. https://doi.org/10.1109/IPC48725.2021.9593053

Heidelberger C, Sorace-Agaskar C, Plant JJ, Kharas D, Swint RB, Dhingra P et al. Efficient Optical Coupling between III-V Semiconductor and SiN_xWaveguides via Heteroepitaxial Integration. In 2021 IEEE Photonics Conference, IPC 2021 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2021. (2021 IEEE Photonics Conference, IPC 2021 - Proceedings). doi: 10.1109/IPC48725.2021.9593053

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abstract = "We demonstrate the first reported integration of III-V waveguides (GaAs/Al0.4Ga0.6As) with SiNx waveguides via heteroepitaxial III-V-on-silicon growth. We achieve efficient optical coupling (-2.5 dB loss/transition) at 1550 nm and low threading dislocation density (4times 10{6}{cm}{-2}), suitable for fabrication of high-performance optoelectronic devices.",

author = "Christopher Heidelberger and Cheryl Sorace-Agaskar and Plant, {Jason J.} and Dave Kharas and Swint, {Reuel B.} and Pankul Dhingra and Lee, {Minjoo L.} and Juodawlkis, {Paul W.}",

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