Abstract

We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEMS are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by combining a finite cloud method based interior mechanical analysis with a boundary cloud method based exterior electrostatic analysis. Lagrangian descriptions are used for both mechanical and electrostatic analyses. Meshless finite cloud and boundary cloud methods combined with fast algorithms and Lagrangian descriptions are flexible, efficient and attractive alternatives compared to conventional finite element/boundary element methods for self-consistent electromechanical analysis. Numerical results are presented for an electrostatic comb drive device.

Original languageEnglish (US)
Pages (from-to)474-477
Number of pages4
JournalIEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers
DOIs
StatePublished - Dec 1 2002
EventIEEE/ACM International Conference on Computer Aided Design (ICCAD) - San Jose, CA, United States
Duration: Nov 10 2002Nov 14 2002

Keywords

  • Boundary cloud method
  • Coupled electro-mechanical analysis
  • Finite cloud method
  • Lagrangian electrostatics
  • Meshless

ASJC Scopus subject areas

  • Software
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

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