Effects of the plasma-wall sheath on transport

J. Mandrekas, C. E. Singer, D. N. Ruzic

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)2315-2318
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume5
Issue number4
DOIs
StatePublished - Jul 1 1987

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this