Effects of synchrotron x-rays on PVD deposited and ion implanted α-Si

Keyphrases

• Crystallization Process 100%
• Irradiation 100%
• Heavy Ions 100%
• Ion Implantation 100%
• Synchrotron X-ray 100%
• PVD Films 100%
• Crystalline Materials 50%
• Bond Length 50%
• Thermal Annealing 50%
• Amorphous Films 50%
• Amorphous Si Film 50%
• Raman Spectroscopy 50%
• Coordination number 50%
• Extended X-ray Absorption Fine Structure (EXAFS) 50%
• Nucleation Centers 50%
• Total Dose 50%
• Crystallites 50%
• Local Structure 50%
• Physical Vapor Deposition 50%
• Amorphous Layer 50%
• Residual Amount 50%
• Solid Phase Epitaxy 50%
• EXELFS 50%

Physics

• Synchrotron 100%
• Crystallization 100%
• Raman Spectroscopy 50%
• Epitaxy 50%
• Nucleation 50%
• Crystallite 50%
• Crystalline Material 50%
• Vapor Deposition 50%

Material Science

• Film 100%
• Physical Vapor Deposition 100%
• Crystallization 33%
• Annealing 16%
• Amorphous Film 16%
• Nucleation 16%
• Raman Spectroscopy 16%
• Extended X-Ray Absorption Fine Structure 16%
• Solid Phase Epitaxy 16%
• Crystalline Material 16%
• Crystallite 16%