Effects of ion-induced electron emission on magnetron plasma instabilities

Keyphrases

• Ion Effect 100%
• Magnetron Plasma 100%
• Electron Emission 100%
• Plasma Current 100%
• Plasma Instabilities 100%
• Ion-induced Electron Emission 100%
• Scanning Electron Microscopy 50%
• Ion Source 50%
• Oxides 50%
• Oscillation 50%
• Large Region 50%
• Insulator 50%
• Auger Electron Spectroscopy 50%
• Vacuum System 50%
• Surface Topography 50%
• Ion Species 50%
• Dense Materials 50%
• Pure Titanium 50%
• Secondary Electron Emission 50%
• Magnetron Sputtering System 50%
• Oxygen Contamination 50%
• High Vacuum 50%
• Compositional Depth Profiling 50%
• Rapid Oscillations 50%
• Plasma Discharge 50%
• Secondary Electron Emission Coefficient 50%
• System Experience 50%
• Photographic Composition 50%
• Atomic Composition 50%
• Gas Coverage 50%
• High-density Targets 50%
• Magnetron Target 50%
• Ion Induced Secondary Electron Yield 50%

Material Science

• Density 100%
• Scanning Electron Microscopy 50%
• Oxide Compound 50%
• Titanium 50%
• Magnetron Sputtering 50%
• Auger Electron Spectroscopy 50%
• Surface Topography 50%

Engineering

• Magnetron 100%
• Electron Emission 100%
• Secondary Electrons 40%
• Ion Source 20%
• Ion Energy 20%
• Depth Profile 20%
• Pure Titanium 20%
• Surface Topography 20%
• Emission Coefficient 20%