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Effect of xenon bombardment on ruthenium-coated grazing incidence collector mirror lifetime for extreme ultraviolet lithography
Martin Nieto, Jean Paul Allain, Vladimir Titov, Matthew R. Hendricks, Ahmed Hassanein, Daniel Rokusek, Christopher Chrobak, Charles Tarrio, Yaniv Barad, Steven Grantham, Thomas B. Lucatorto, Brian Rice
Research output: Contribution to journal › Article › peer-review