Effect of the post-deposition processing ambient on the preparation of superconducting YBa2Cu3O7-x coevaporated thin films using a BaF2 source

Siu Wai Chan, B. G. Bagley, L. H. Greene, M. Giroud, W. L. Feldmann, K. R. Jenkin, B. J. Wilkins

Research output: Contribution to journalArticlepeer-review

Abstract

We have investigated the effect of the post-deposition processing ambient on the preparation of YBa2Cu3O7-x thin films from a BaF2 source. The role of H2O vapor during the high-temperature anneal is understood through a thermodynamic analysis of the fluorine removal reaction. The role of a HF getter (e.g., SiO2) is understood through the same type of analysis. We have demonstrated that a zero resistance transition temperature at 77 K can be obtained for an annealing temperature as low as 690°C for films deposited on SrTiO3 substrates by increasing the PH2O and decreasing PHF during the high-temperature soak cycle.

Original languageEnglish (US)
Pages (from-to)1443-1445
Number of pages3
JournalApplied Physics Letters
Volume53
Issue number15
DOIs
StatePublished - 1988

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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