Effect of strain-rate on the mechanical behavior of Pt-films for MEMS

X. Tang; K. Jonnalagadda; I. Chasiotis; J. Lambros; R. Polcawich; J. Pulskamp; M. Dubey

Effect of strain-rate on the mechanical behavior of Pt-films for MEMS

X. Tang, K. Jonnalagadda, I. Chasiotis, J. Lambros, R. Polcawich, J. Pulskamp, M. Dubey

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A method to measure the mechanical behavior of Pt thin films was developed. It employs high magnification optical microscopy and Digital Image Correlation to extract sub-micron (100 nm local displacement resolution) deformation fields in free-standing thin films and calculate their elastic/plastic properties as a function of strain rate. In this study, the specimen gauge length and thickness were 1000 μm and 400 nm, respectively, and the gauge width varied between 100 μm and 200 μm. The micron scale specimens were loaded using a custom-made piezoelectrically driven micro-tension system and the applied nominal strain rates were between 10 ^-6 to 10 ^-3 s ^-1. The stress-strain diagrams showed a linear elastic regime up to the yield stress, with elastic modulus E = 178.3 ± 6.2 GPa.

Original language	English (US)
Title of host publication	Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007
Pages	1270-1275
Number of pages	6
State	Published - 2007
Event	SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007 - Springfield, MA, United States Duration: Jun 3 2007 → Jun 6 2007

Publication series

Name	Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007
Volume	2

Other

Other	SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007
Country/Territory	United States
City	Springfield, MA
Period	6/3/07 → 6/6/07

ASJC Scopus subject areas

Mechanical Engineering

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Tang, X., Jonnalagadda, K., Chasiotis, I., Lambros, J., Polcawich, R., Pulskamp, J., & Dubey, M. (2007). Effect of strain-rate on the mechanical behavior of Pt-films for MEMS. In Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007 (pp. 1270-1275). (Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007; Vol. 2).

Effect of strain-rate on the mechanical behavior of Pt-films for MEMS. / Tang, X.; Jonnalagadda, K.; Chasiotis, I. et al.
Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007. 2007. p. 1270-1275 (Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tang, X, Jonnalagadda, K, Chasiotis, I , Lambros, J, Polcawich, R, Pulskamp, J & Dubey, M 2007, Effect of strain-rate on the mechanical behavior of Pt-films for MEMS. in Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007. Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007, vol. 2, pp. 1270-1275, SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007, Springfield, MA, United States, 6/3/07.

Tang X, Jonnalagadda K, Chasiotis I , Lambros J, Polcawich R, Pulskamp J et al. Effect of strain-rate on the mechanical behavior of Pt-films for MEMS. In Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007. 2007. p. 1270-1275. (Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007).

@inproceedings{97288e62907d4a5593fb533471ab235e,

title = "Effect of strain-rate on the mechanical behavior of Pt-films for MEMS",

abstract = "A method to measure the mechanical behavior of Pt thin films was developed. It employs high magnification optical microscopy and Digital Image Correlation to extract sub-micron (100 nm local displacement resolution) deformation fields in free-standing thin films and calculate their elastic/plastic properties as a function of strain rate. In this study, the specimen gauge length and thickness were 1000 μm and 400 nm, respectively, and the gauge width varied between 100 μm and 200 μm. The micron scale specimens were loaded using a custom-made piezoelectrically driven micro-tension system and the applied nominal strain rates were between 10 -6 to 10 -3 s -1. The stress-strain diagrams showed a linear elastic regime up to the yield stress, with elastic modulus E = 178.3 ± 6.2 GPa.",

author = "X. Tang and K. Jonnalagadda and I. Chasiotis and J. Lambros and R. Polcawich and J. Pulskamp and M. Dubey",

year = "2007",

language = "English (US)",

isbn = "1604232226",

series = "Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007",

pages = "1270--1275",

booktitle = "Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007",

note = "SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007 ; Conference date: 03-06-2007 Through 06-06-2007",

}

TY - GEN

T1 - Effect of strain-rate on the mechanical behavior of Pt-films for MEMS

AU - Tang, X.

AU - Jonnalagadda, K.

AU - Chasiotis, I.

AU - Lambros, J.

AU - Polcawich, R.

AU - Pulskamp, J.

AU - Dubey, M.

PY - 2007

Y1 - 2007

N2 - A method to measure the mechanical behavior of Pt thin films was developed. It employs high magnification optical microscopy and Digital Image Correlation to extract sub-micron (100 nm local displacement resolution) deformation fields in free-standing thin films and calculate their elastic/plastic properties as a function of strain rate. In this study, the specimen gauge length and thickness were 1000 μm and 400 nm, respectively, and the gauge width varied between 100 μm and 200 μm. The micron scale specimens were loaded using a custom-made piezoelectrically driven micro-tension system and the applied nominal strain rates were between 10 -6 to 10 -3 s -1. The stress-strain diagrams showed a linear elastic regime up to the yield stress, with elastic modulus E = 178.3 ± 6.2 GPa.

AB - A method to measure the mechanical behavior of Pt thin films was developed. It employs high magnification optical microscopy and Digital Image Correlation to extract sub-micron (100 nm local displacement resolution) deformation fields in free-standing thin films and calculate their elastic/plastic properties as a function of strain rate. In this study, the specimen gauge length and thickness were 1000 μm and 400 nm, respectively, and the gauge width varied between 100 μm and 200 μm. The micron scale specimens were loaded using a custom-made piezoelectrically driven micro-tension system and the applied nominal strain rates were between 10 -6 to 10 -3 s -1. The stress-strain diagrams showed a linear elastic regime up to the yield stress, with elastic modulus E = 178.3 ± 6.2 GPa.

UR - http://www.scopus.com/inward/record.url?scp=36148971315&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36148971315&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:36148971315

SN - 1604232226

SN - 9781604232226

T3 - Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007

SP - 1270

EP - 1275

BT - Proceedings of the SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007

T2 - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2007

Y2 - 3 June 2007 through 6 June 2007

ER -

Effect of strain-rate on the mechanical behavior of Pt-films for MEMS

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