Effect of projectile energy, specimen temperature and fast thermal diffusing atoms on ion beam mixing

Ion beam mixing of Au markers in Cu samples was measured after 500-kev Kr irradiation at 6, 80, and 295 K. Additional measurements were performed on samples irradiated at 80 K with 1. 8-Mev Kr and 295 K with 1. 7-Mev Kr. It was observed that the mixing is the same at 6 K as at 80 K but that it is somewhat greater at 295 K. It was also found that at both 80 and 295 K the mixing is the same for 500-kev as for 1. 7 Mev projectile energies if the irradiations are compared on the basis of deposited damage energy. Another set of mixing measurements was performed on Ni and Ti markers in Hf and Hf markers in Ni at 6, 80, and 295 K.