Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures

Julian A. Michaels, Derek R. Wood, Paul J. Froeter, Wen Huang, Dane J. Sievers, Xiuling Li

Research output: Contribution to journalArticle


Strain-induced self-rolled-up membranes (S-RuM) are structures formed spontaneously by releasing a strained layer or layer stacks from its mechanical support, with unique applications in passive photonics, electronics, and bioengineering. Depending on the thermal properties of the strained layers, these structures can experience various thermally induced deformations. These deformations can be avoided and augmented with the addition of strategically placed perforations in the membrane. This study reports on the use of perforations to modify the thermal effects on strained silicon nitride S-RuM structures. A programmable fuse with well-defined thermal threshold, ultrasmall footprint, and 2–3 V voltage rating is demonstrated, which can potentially serve as an on-chip sensing device for power electronic circuits.

Original languageEnglish (US)
Article number1901022
JournalAdvanced Materials Interfaces
Issue number21
StatePublished - Nov 1 2019



  • perforation
  • self-rolled-up membrane
  • silicon nitride membrane
  • thermal breakdown

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering

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