Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures

Julian A. Michaels, Derek R. Wood, Paul J. Froeter, Wen Huang, Dane J. Sievers, Xiuling Li

Research output: Contribution to journalArticle

Abstract

Strain-induced self-rolled-up membranes (S-RuM) are structures formed spontaneously by releasing a strained layer or layer stacks from its mechanical support, with unique applications in passive photonics, electronics, and bioengineering. Depending on the thermal properties of the strained layers, these structures can experience various thermally induced deformations. These deformations can be avoided and augmented with the addition of strategically placed perforations in the membrane. This study reports on the use of perforations to modify the thermal effects on strained silicon nitride S-RuM structures. A programmable fuse with well-defined thermal threshold, ultrasmall footprint, and 2–3 V voltage rating is demonstrated, which can potentially serve as an on-chip sensing device for power electronic circuits.

Original languageEnglish (US)
Article number1901022
JournalAdvanced Materials Interfaces
Volume6
Issue number21
DOIs
StatePublished - Nov 1 2019

Fingerprint

Membrane structures
Electric fuses
Power electronics
Silicon nitride
Thermal effects
Photonics
Electronic equipment
Thermodynamic properties
Membranes
Networks (circuits)
Electric potential
Hot Temperature
Bioengineering
Strained silicon

Keywords

  • perforation
  • self-rolled-up membrane
  • silicon nitride membrane
  • thermal breakdown

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures. / Michaels, Julian A.; Wood, Derek R.; Froeter, Paul J.; Huang, Wen; Sievers, Dane J.; Li, Xiuling.

In: Advanced Materials Interfaces, Vol. 6, No. 21, 1901022, 01.11.2019.

Research output: Contribution to journalArticle

Michaels, Julian A. ; Wood, Derek R. ; Froeter, Paul J. ; Huang, Wen ; Sievers, Dane J. ; Li, Xiuling. / Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures. In: Advanced Materials Interfaces. 2019 ; Vol. 6, No. 21.
@article{069c3847316c4b5c8927560ee457a968,
title = "Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures",
abstract = "Strain-induced self-rolled-up membranes (S-RuM) are structures formed spontaneously by releasing a strained layer or layer stacks from its mechanical support, with unique applications in passive photonics, electronics, and bioengineering. Depending on the thermal properties of the strained layers, these structures can experience various thermally induced deformations. These deformations can be avoided and augmented with the addition of strategically placed perforations in the membrane. This study reports on the use of perforations to modify the thermal effects on strained silicon nitride S-RuM structures. A programmable fuse with well-defined thermal threshold, ultrasmall footprint, and 2–3 V voltage rating is demonstrated, which can potentially serve as an on-chip sensing device for power electronic circuits.",
keywords = "perforation, self-rolled-up membrane, silicon nitride membrane, thermal breakdown",
author = "Michaels, {Julian A.} and Wood, {Derek R.} and Froeter, {Paul J.} and Wen Huang and Sievers, {Dane J.} and Xiuling Li",
year = "2019",
month = "11",
day = "1",
doi = "10.1002/admi.201901022",
language = "English (US)",
volume = "6",
journal = "Advanced Materials Interfaces",
issn = "2196-7350",
publisher = "John Wiley and Sons Ltd",
number = "21",

}

TY - JOUR

T1 - Effect of Perforation on the Thermal and Electrical Breakdown of Self-Rolled-Up Nanomembrane Structures

AU - Michaels, Julian A.

AU - Wood, Derek R.

AU - Froeter, Paul J.

AU - Huang, Wen

AU - Sievers, Dane J.

AU - Li, Xiuling

PY - 2019/11/1

Y1 - 2019/11/1

N2 - Strain-induced self-rolled-up membranes (S-RuM) are structures formed spontaneously by releasing a strained layer or layer stacks from its mechanical support, with unique applications in passive photonics, electronics, and bioengineering. Depending on the thermal properties of the strained layers, these structures can experience various thermally induced deformations. These deformations can be avoided and augmented with the addition of strategically placed perforations in the membrane. This study reports on the use of perforations to modify the thermal effects on strained silicon nitride S-RuM structures. A programmable fuse with well-defined thermal threshold, ultrasmall footprint, and 2–3 V voltage rating is demonstrated, which can potentially serve as an on-chip sensing device for power electronic circuits.

AB - Strain-induced self-rolled-up membranes (S-RuM) are structures formed spontaneously by releasing a strained layer or layer stacks from its mechanical support, with unique applications in passive photonics, electronics, and bioengineering. Depending on the thermal properties of the strained layers, these structures can experience various thermally induced deformations. These deformations can be avoided and augmented with the addition of strategically placed perforations in the membrane. This study reports on the use of perforations to modify the thermal effects on strained silicon nitride S-RuM structures. A programmable fuse with well-defined thermal threshold, ultrasmall footprint, and 2–3 V voltage rating is demonstrated, which can potentially serve as an on-chip sensing device for power electronic circuits.

KW - perforation

KW - self-rolled-up membrane

KW - silicon nitride membrane

KW - thermal breakdown

UR - http://www.scopus.com/inward/record.url?scp=85071933486&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85071933486&partnerID=8YFLogxK

U2 - 10.1002/admi.201901022

DO - 10.1002/admi.201901022

M3 - Article

AN - SCOPUS:85071933486

VL - 6

JO - Advanced Materials Interfaces

JF - Advanced Materials Interfaces

SN - 2196-7350

IS - 21

M1 - 1901022

ER -