Effect of native Al₂O₃ on the elastic response of nanoscale Al films

Engineering

• Nanoscale 100%
• Elastic Response 100%
• Oxide Layer 100%
• Tensiles 66%
• Modulus of Elasticity 66%
• Microelectromechanical System 33%
• Analytical Model 33%
• Experimental Result 33%
• Aluminum Oxide 33%
• Surface Morphology 33%
• Model Prediction 33%
• Material Parameter 33%
• Surface Oxide 33%
• Dry Air 33%
• Measured Material 33%

Keyphrases

• Aluminum Oxide 100%
• Elastic Response 100%
• Al Film 100%
• Elastic Modulus 40%
• Effective Modulus 40%
• Analytical Model 20%
• Surface Morphology 20%
• Submicron 20%
• Oxide Layer 20%
• Model Prediction 20%
• Wavy Surface 20%
• Material Parameters 20%
• Uniaxial Tensile Test 20%
• Dry Air 20%
• Tensile Measurements 20%
• Native Oxide Layer 20%
• Al2O3 Layer 20%
• Al2O3 Oxide 20%
• Uniaxial Tensile 20%
• MEMS Technique 20%
• Al-Al2O3 Composite 20%
• Surface Oxide Layer 20%

Material Science

• Aluminum Oxide 100%
• Film 100%
• Elastic Moduli 40%
• Oxide Compound 40%
• Microelectromechanical System 20%
• Surface Morphology 20%
• Oxide Surface 20%
• Composite Material 20%
• Surface (Surface Science) 20%