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Effect of low temperature deuterium annealing on plasma process induced damage
S. H. Lee, Y. K. Kim, Y. H. Lee, H. S. Kang, C. G. Ahn, B. K. Kang, Jinju Lee, Kangguo Cheng, Zhi Chen, Karl Hess, Joseph W. Lyding
Research output: Contribution to conference › Paper › peer-review