Effect of ion bombardment on stress in thin metal films

S. G. Mayr, R. S. Averback

Research output: Contribution to journalArticlepeer-review


Ion-beam-irradiation-induced changes in the stresses operating in thin films are correlated with the thermodynamic phases of the films and the evolution in the film microstructures and morphologies. We investigate using a combination of experiments and molecular dynamics computer simulations the mechanisms that lead to residual stress changes in amorphous, nanocrystalline, columnar polycrystalline and single-crystal thin films. While local viscous relaxation within thermal spikes underlies all stress changes, i.e., a liquidlike region along the collision cascade, it can lead to very different states of stress in the different metallic films.

Original languageEnglish (US)
JournalPhysical Review B - Condensed Matter and Materials Physics
Issue number21
StatePublished - Dec 31 2003

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics


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