Effect of hydrogen on the microstructural, optical, and electronic properties of a-Si:H thin films deposited by direct current magnetron reactive sputtering

  • M. Pinarbasi
  • , N. Maley
  • , M. J. Kushner
  • , A. Myers
  • , John R Abelson
  • , J. A. Thornton

Research output: Contribution to journal › Article › peer-review

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Material Science