Effect of dose rate on ion beam mixing in Nb-Si

Thomas Banwell, M. A. Nicolet, R. S. Averback, L. J. Thompson

Research output: Contribution to journalArticlepeer-review


The influence of dose rate, i.e., ion flux, on ion beam mixing in Nb-Si bilayer samples was measured at room temperature and 325°C. At the higher temperature, an increase in dose rate of a factor of 20 caused a decrease in the thickness of the mixed layer by a factor of 1.6 for equal total doses. At room temperature, the same change in flux had no effect on mixing. These results are consistent with radiation-enhanced diffusion theory in the recombination-limited regime.

Original languageEnglish (US)
Pages (from-to)1519-1521
Number of pages3
JournalApplied Physics Letters
Issue number22
StatePublished - 1986
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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