Abstract
We study the mechanisms of damage production during ion irradiation using molecular dynamics simulations of 400 eV-10 keV collision cascades in four different materials. The materials Al, Si, Cu and Ge are contrasted to each other with respect to the mass, melting temperature and crystal structure. The results show that the crystal structure clearly has the strongest effect on the nature of the damage produced, and elucidate how the open crystal structure affects the nature of defects produced in silicon.
Original language | English (US) |
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Pages (from-to) | 113-118 |
Number of pages | 6 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 469 |
DOIs | |
State | Published - 1997 |
Event | Proceedings of the 1997 MRS Spring Symposium - San Francisco, CA, USA Duration: Mar 31 1997 → Apr 4 1997 |
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering