Effect of anode bias on plasma confinement in direct current magnetron discharges

J. R. Doyle, A. Nuruddin, John R Abelson

Research output: Contribution to journalLetter

Original languageEnglish (US)
Pages (from-to)886-888
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume12
Issue number3
DOIs
StatePublished - May 1994

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Effect of anode bias on plasma confinement in direct current magnetron discharges. / Doyle, J. R.; Nuruddin, A.; Abelson, John R.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 12, No. 3, 05.1994, p. 886-888.

Research output: Contribution to journalLetter

@article{fe66f474734d4d7184428046268cf715,
title = "Effect of anode bias on plasma confinement in direct current magnetron discharges",
author = "Doyle, {J. R.} and A. Nuruddin and Abelson, {John R}",
year = "1994",
month = "5",
doi = "10.1116/1.579273",
language = "English (US)",
volume = "12",
pages = "886--888",
journal = "Journal of Vacuum Science and Technology A",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "3",

}

TY - JOUR

T1 - Effect of anode bias on plasma confinement in direct current magnetron discharges

AU - Doyle, J. R.

AU - Nuruddin, A.

AU - Abelson, John R

PY - 1994/5

Y1 - 1994/5

UR - http://www.scopus.com/inward/record.url?scp=70349154860&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=70349154860&partnerID=8YFLogxK

U2 - 10.1116/1.579273

DO - 10.1116/1.579273

M3 - Letter

AN - SCOPUS:70349154860

VL - 12

SP - 886

EP - 888

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

SN - 0734-2101

IS - 3

ER -