Effect of anode bias on plasma confinement in direct current magnetron discharges

J. R. Doyle; A. Nuruddin; J. R. Abelson

doi:10.1116/1.579273

Effect of anode bias on plasma confinement in direct current magnetron discharges

J. R. Doyle, A. Nuruddin, J. R. Abelson

Research output: Contribution to journal › Letter › peer-review

Original language	English (US)
Pages (from-to)	886-888
Number of pages	3
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	12
Issue number	3
DOIs	https://doi.org/10.1116/1.579273
State	Published - May 1994

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.579273

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title = "Effect of anode bias on plasma confinement in direct current magnetron discharges",

author = "Doyle, {J. R.} and A. Nuruddin and Abelson, {J. R.}",

year = "1994",

month = may,

doi = "10.1116/1.579273",

language = "English (US)",

volume = "12",

pages = "886--888",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

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AU - Nuruddin, A.

AU - Abelson, J. R.

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DO - 10.1116/1.579273

M3 - Letter

AN - SCOPUS:70349154860

SN - 0734-2101

VL - 12

SP - 886

EP - 888

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 3

ER -

Effect of anode bias on plasma confinement in direct current magnetron discharges

ASJC Scopus subject areas

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