Effect of anode bias on plasma confinement in direct current magnetron discharges

J. R. Doyle, A. Nuruddin, J. R. Abelson

Research output: Contribution to journalLetter

Original languageEnglish (US)
Pages (from-to)886-888
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume12
Issue number3
DOIs
StatePublished - May 1994

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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