Dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by infrared radiation

Beomjin Kwon, Matthew Rosenberger, Rohit Bhargava, David G. Cahill, William P. King

Research output: Contribution to journalReview article

Abstract

This paper investigates the dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by an infrared laser operating at a wavelenegth of 10.35 m. A model relates incident radiation, heat transfer, temperature distribution in the cantilever, and thermal expansion mismatch to find the cantilever displacement. Experiments were conducted on two custom-fabricated bimaterial cantilevers and two commercially available bimaterial microcantilevers. The cantilever response was measured as a function of the modulation frequency of the laser over the range of 0.01-30 kHz. The model and the method of cantilever displacement calibration can be applied for bimaterial cantilever with thick coating layer. The sensitivity and signal-to-noise of bimaterial cantilevers were evaluated in terms of either total incident power or incident flux. The custom-fabricated bimaterial cantilevers showed 9X or 190X sensitivity improvement compared to commercial cantilevers. The detection limit on incident flux is as small as 0.10 pW μm -2 Hz -12.

Original languageEnglish (US)
Article number015003
JournalReview of Scientific Instruments
Volume83
Issue number1
DOIs
StatePublished - Jan 1 2012

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infrared radiation
Fluxes
Infrared radiation
Heating
heating
Infrared lasers
incident radiation
sensitivity
Heat radiation
Frequency modulation
infrared lasers
frequency modulation
Thermal expansion
thermal expansion
Temperature distribution
temperature distribution
heat transfer
Calibration
coatings
Coatings

ASJC Scopus subject areas

  • Instrumentation

Cite this

Dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by infrared radiation. / Kwon, Beomjin; Rosenberger, Matthew; Bhargava, Rohit; Cahill, David G.; King, William P.

In: Review of Scientific Instruments, Vol. 83, No. 1, 015003, 01.01.2012.

Research output: Contribution to journalReview article

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