Abstract
This paper investigates the dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by an infrared laser operating at a wavelenegth of 10.35 m. A model relates incident radiation, heat transfer, temperature distribution in the cantilever, and thermal expansion mismatch to find the cantilever displacement. Experiments were conducted on two custom-fabricated bimaterial cantilevers and two commercially available bimaterial microcantilevers. The cantilever response was measured as a function of the modulation frequency of the laser over the range of 0.01-30 kHz. The model and the method of cantilever displacement calibration can be applied for bimaterial cantilever with thick coating layer. The sensitivity and signal-to-noise of bimaterial cantilevers were evaluated in terms of either total incident power or incident flux. The custom-fabricated bimaterial cantilevers showed 9X or 190X sensitivity improvement compared to commercial cantilevers. The detection limit on incident flux is as small as 0.10 pW μm -2 Hz -12.
| Original language | English (US) |
|---|---|
| Article number | 015003 |
| Journal | Review of Scientific Instruments |
| Volume | 83 |
| Issue number | 1 |
| DOIs | |
| State | Published - Jan 1 2012 |
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ASJC Scopus subject areas
- Instrumentation
Cite this
Dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by infrared radiation. / Kwon, Beomjin; Rosenberger, Matthew; Bhargava, Rohit; Cahill, David G.; King, William P.
In: Review of Scientific Instruments, Vol. 83, No. 1, 015003, 01.01.2012.Research output: Contribution to journal › Review article
}
TY - JOUR
T1 - Dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by infrared radiation
AU - Kwon, Beomjin
AU - Rosenberger, Matthew
AU - Bhargava, Rohit
AU - Cahill, David G.
AU - King, William P.
PY - 2012/1/1
Y1 - 2012/1/1
N2 - This paper investigates the dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by an infrared laser operating at a wavelenegth of 10.35 m. A model relates incident radiation, heat transfer, temperature distribution in the cantilever, and thermal expansion mismatch to find the cantilever displacement. Experiments were conducted on two custom-fabricated bimaterial cantilevers and two commercially available bimaterial microcantilevers. The cantilever response was measured as a function of the modulation frequency of the laser over the range of 0.01-30 kHz. The model and the method of cantilever displacement calibration can be applied for bimaterial cantilever with thick coating layer. The sensitivity and signal-to-noise of bimaterial cantilevers were evaluated in terms of either total incident power or incident flux. The custom-fabricated bimaterial cantilevers showed 9X or 190X sensitivity improvement compared to commercial cantilevers. The detection limit on incident flux is as small as 0.10 pW μm -2 Hz -12.
AB - This paper investigates the dynamic thermomechanical response of bimaterial microcantilevers to periodic heating by an infrared laser operating at a wavelenegth of 10.35 m. A model relates incident radiation, heat transfer, temperature distribution in the cantilever, and thermal expansion mismatch to find the cantilever displacement. Experiments were conducted on two custom-fabricated bimaterial cantilevers and two commercially available bimaterial microcantilevers. The cantilever response was measured as a function of the modulation frequency of the laser over the range of 0.01-30 kHz. The model and the method of cantilever displacement calibration can be applied for bimaterial cantilever with thick coating layer. The sensitivity and signal-to-noise of bimaterial cantilevers were evaluated in terms of either total incident power or incident flux. The custom-fabricated bimaterial cantilevers showed 9X or 190X sensitivity improvement compared to commercial cantilevers. The detection limit on incident flux is as small as 0.10 pW μm -2 Hz -12.
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U2 - 10.1063/1.3680107
DO - 10.1063/1.3680107
M3 - Review article
C2 - 22299979
AN - SCOPUS:84859201074
VL - 83
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
SN - 0034-6748
IS - 1
M1 - 015003
ER -