Dynamic simulation of an electrostatically actuated impact microactuator

X. Zhao, H. Dankowicz, C. K. Reddy, A. H. Nayfeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law based on Newton's coefficient of restitution. The system dynamics is intensively studied. We investigate the influence of various parameters including excitation frequency and voltage.

Original languageEnglish (US)
Title of host publication2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
EditorsM. Laudon, B. Romanowicz
Pages247-250
Number of pages4
StatePublished - 2004
Externally publishedYes
Event2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 - Boston, MA, United States
Duration: Mar 7 2004Mar 11 2004

Publication series

Name2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
Volume2

Other

Other2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
CountryUnited States
CityBoston, MA
Period3/7/043/11/04

Keywords

  • Dynamic simulation
  • Electrostatic
  • Impact
  • Microactuators

ASJC Scopus subject areas

  • Engineering(all)

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