@inproceedings{d7496893e270403eac55636ce013e02e,
title = "Dynamic analysis of electrostatic MEMS by meshless methods",
abstract = "Electrostatically actuated microstructures are widely used in microelectromechanical systems (MEMS). Computational analysis of electrostatic MEMS requires a self-consistent solution of the interior elastic domain and the exterior electrostatic domain. This paper proposes an efficient approach to carry out the dynamic analysis of electrostatic MEMS structures. The approach employs a meshless Finite Cloud Method (FCM) to solve the interior mechanical domain of the structures and a scattered point Boundary Cloud Method (BCM) to solve the exterior electrostatic domain. Lagrangian descriptions are used in both mechanical and electrostatic analyses. The electrostatic forces and mechanical deformations are all computed on the undeformed configuration of the structures. The approach provides an efficient computational tool for dynamic analysis of electrostatic MEM devices.",
keywords = "Boundary cloud method, Coupled electro-mechanical analysis, Finite cloud method, Lagrangian description, Meshless",
author = "Gang Li and Aluru, {N. R.}",
year = "2002",
language = "English (US)",
isbn = "0970827571",
series = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002",
pages = "356--359",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002",
note = "2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002 ; Conference date: 21-04-2002 Through 25-04-2002",
}