Abstract

Electrostatically actuated microstructures are widely used in microelectromechanical systems (MEMS). Computational analysis of electrostatic MEMS requires a self-consistent solution of the interior elastic domain and the exterior electrostatic domain. This paper proposes an efficient approach to carry out the dynamic analysis of electrostatic MEMS structures. The approach employs a meshless Finite Cloud Method (FCM) to solve the interior mechanical domain of the structures and a scattered point Boundary Cloud Method (BCM) to solve the exterior electrostatic domain. Lagrangian descriptions are used in both mechanical and electrostatic analyses. The electrostatic forces and mechanical deformations are all computed on the undeformed configuration of the structures. The approach provides an efficient computational tool for dynamic analysis of electrostatic MEM devices.

Original languageEnglish (US)
Title of host publication2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002
EditorsM. Laudon, B. Romanowicz
Pages356-359
Number of pages4
StatePublished - Dec 1 2002
Event2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002 - San Juan, Puerto Rico
Duration: Apr 21 2002Apr 25 2002

Publication series

Name2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Other

Other2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002
CountryPuerto Rico
CitySan Juan
Period4/21/024/25/02

Keywords

  • Boundary cloud method
  • Coupled electro-mechanical analysis
  • Finite cloud method
  • Lagrangian description
  • Meshless

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Li, G., & Aluru, N. R. (2002). Dynamic analysis of electrostatic MEMS by meshless methods. In M. Laudon, & B. Romanowicz (Eds.), 2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002 (pp. 356-359). (2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002).