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Dry stiction of micro structures - Theory and experiment
Mark Meinhart
, Norman Miller
,
M Taher A Saif
Mechanical Science and Engineering
Bioengineering
Beckman Institute for Advanced Science and Technology
Carl R. Woese Institute for Genomic Biology
Biomedical and Translational Sciences
Center for South Asian and Middle Eastern Studies
Neuroscience Program
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Engineering
Aerodynamic Drag
33%
Dry Environment
16%
Microstructure
100%
Nitrogen
16%
Process Gas
16%
Pure Aluminum
16%
Shielding Effect
16%
Stiction
100%
Material Science
Aluminum
100%
Microstructure
100%
Surface Property
100%
Keyphrases
Microstructure Theory
100%
Purging Process
16%