@inproceedings{5037843a22f94e25b7e81e3ee96bd9f0,
title = "Doubly clamped single-walled carbon nanotube resonators operating in MHz frequencies",
abstract = "We report fabrication and experimental characterization of doubly clamped metallic single-walled carbon nanotube (SWNT) resonators. Fabricated resonators are based on CVD grown metallic nanotubes clamped and contacted on both sides and suspended on top of a Poly-Si actuation pad. We measured devices with 2 to 3 μm length with resonance frequencies ranging from 11 to 69 MHz. The resonance is observed in atmospheric pressure when peak to peak actuation voltages are around 2V. We also measured reduction in DC-conductance of suspended SWNTs by applying actuation voltage. The advantages of using Poly-Si actuation pad are that devices could be modulated individually through patterned Poly-Si pads with minimum parasitic capacitance from the pad to SWNT contacts (high frequency operation is possible) and compatibility of Poly-Si with subsequent high temperature growth of SWNTs.",
keywords = "Carbon nanotube, Metallic nanotubes, Nanotechnology, Poly-Silicon, Resonator, Single-walled",
author = "Laleh Rabieirad and Sunkook Kim and Moonsub Shim and Saeed Mohammadi",
year = "2005",
doi = "10.1109/NANO.2005.1500854",
language = "English (US)",
isbn = "0780391993",
series = "2005 5th IEEE Conference on Nanotechnology",
publisher = "IEEE Computer Society",
pages = "653--656",
booktitle = "2005 5th IEEE Conference on Nanotechnology",
note = "2005 5th IEEE Conference on Nanotechnology ; Conference date: 11-07-2005 Through 15-07-2005",
}