Abstract
A new technique for generating registered patterns on opposite sides of a substrate has been developed. Rather than introducing the patterns sequentially and registering them with an infrared or dual viewing microscope, the photomasks for the two surfaces are pre-aligned and assembled into a hinged configuration referred to as an alligator mask. Substrates can then be inserted into the alligator mask and exposed on both sides without on-line alignment. Since a registered set of exposed patterns now exists, subsequent processing can be performed simultaneously on both surfaces.
| Original language | English (US) |
|---|---|
| Pages | 55-60 |
| Number of pages | 6 |
| Volume | 21 |
| No | 8 |
| Specialist publication | Solid State Technology |
| State | Published - 1978 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry