Distribution of nanoscale nuclei in the amorphous dome of a phase change random access memory

Bong Sub Lee, Kristof Darmawikarta, Simone Raoux, Yen Hao Shih, Yu Zhu, Stephen G. Bishop, John R. Abelson

Research output: Contribution to journalArticlepeer-review

Abstract

The nanoscale crystal nuclei in an amorphous Ge2Sb 2Te5 bit in a phase change memory device were evaluated by fluctuation transmission electron microscopy. The quench time in the device (∼10 ns) afforded more and larger nuclei in the melt-quenched state than in the as-deposited state. However, nuclei were even more numerous and larger in a test structure with a longer quench time (∼100 ns), verifying the prediction of nucleation theory that slower cooling produces more nuclei. It also demonstrates that the thermal design of devices will strongly influence the population of nuclei, and thus the speed and data retention characteristics.

Original languageEnglish (US)
Article number071907
JournalApplied Physics Letters
Volume104
Issue number7
DOIs
StatePublished - Feb 17 2014

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Fingerprint

Dive into the research topics of 'Distribution of nanoscale nuclei in the amorphous dome of a phase change random access memory'. Together they form a unique fingerprint.

Cite this